After power supply power, the PF output power is unstable, and the fluctuation range is very large.
来源: admin   发布时间: 2015-08-18   905 次浏览   大小:  16px  14px  12px

1.电源匹配放电后，PF功率跳动范围很大。辉光闪烁。遇上这种情况时请及时关闭功率输出。电源功率输出不稳定极容易烧坏电源。

2.出现这种问题的原因主要是输出功率太高，可以降低输出功率。还有就是腔体真空度不稳定，检查一下腔体的真空度与气流量是否是恒定的。另外就是匹配不好。最好是用低功率100/200W起辉后再加到需要的功率。因为电源在高功率起辉时容易出现不稳定现象。

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